Non-conductive samples are sputter coated with gold to prevent electronic charging. In order to perform this type of analysis the sample needs to be a solid material, it cannot be performed on liquids or gases. The topography of films can at times mask the number of film layers in a sample elemental mapping can show layers not visible by other methods.Ĭontamination analysis, identification of filler content, failure analysis, forensic engineering, and fractography are also other common situations in which SEM Analysis pared with EDS is very valuable.Īdditionally, the SEM/EDS is a workhorse technique for metals testing such as fractography, embrittlement, corrosion analysis and alloy compositions.

Not only that, used in conjunction with EDS it is possible to compare different chemical compositions between each layer. SEM analysis can be performed as part of a film layer analysis to determine the thickness of a film. It is also a go-to analytical technique for performing nanocharacterization. SEM-EDS Analysis is a great method for determining particle sizes and elemental composition. This combined technique is referred to as SEM-EDS or SEM-EDX Analysis.

EDS provides data about the chemical composition of the sample and provides additional data about the features that are observed in the SEM micrographs. These X-rays are detected with the EDS detector to give elemental information about the sample. X-rays are also released from the surface of the sample that carry a unique energy signature that are specific to elements found in the sample. The sample region evaluated with SEM Analysis can also be analyzed to determine the specific elements that comprise the sample region by utilizing Energy Dispersion Spectroscopy (EDS). This powerful electron microscope is capable of magnifying up to 500,000 times! SEM Analysis is more powerful than Optical Microscopy not only because of the much increased magnification power but also because of the increase in depth of field. The two detectors most commonly used include the Secondary Electron Detector (SED) and the Backscattered Electron (BSE) Detector.The electrons interact with the detector to create an image. When the beam of electrons hits the sample, it causes secondary electrons to be released from the sample which are detected to provide an image based off the topography of the surface. The sample is under vacuum to ensure the electron beam stays focused and does not interact with particles in the air. Scanning Electron Microscopy (SEM) magnifies a specific sample region using a high energy focused beam of electrons. About Scanning Electron Microscopy & Energy Dispersive Spectroscopy

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